Automated transport cassette clean oven
Introducing the automatic cassette clean oven with a conveyor that can process one set at a time!
We would like to introduce our "Automated Transport Cassette Clean Oven." It is designed to handle a set of 6 cassettes, each containing 25 pieces of 8" wafers, using one clean oven along with loaders and unloaders equipped with transport robots. It is capable of processing one set at a time. The transport method can be either automatic or manual, and the maximum temperature inside the clean oven is 140°C. The external dimensions are 2590 (W) × 1400 (D) × 2400 (H). 【Main Specifications】 ■ Processed Wafers: 8” quartz wafers in cassettes × 6 ■ Transport Method: Automatic / Manual ■ Clean Oven Internal Temperature: MAX 140°C ■ Clean Oven Cleanliness: Class 10 at 0.3μm RT ■ External Dimensions: 2590 (W) × 1400 (D) × 2400 (H) *For more details, please refer to the PDF document or feel free to contact us.
- Company：株式会社ダン科学 入間営業所
- Price：Other
